Electronlithography Tool for Ice Lithography

Information

15 - Voluntary ex ante transparency notice
12/10/2018 8:27 AM (GMT+01:00)

Buyer

Danmarks Tekniske Universitet Danmarks Tekniske Universitet
Alexi Burns-Tang Alexi Burns-Tang
Anker Engelundsvej 1
2800 Kongens Lyngby
Denmark
30060946

Assignment text

The purchase relates to a refurbished four year old demo model of an electronlithography tool. The main unit is an eLINE Plus tool from Raith equipped with a 30 kV Gemini column from Zeiss, an interferometer controlled precision stage and beamsteering control system and software from Raith. The eLINE tool extinguishes itself beyond the column and stage especially by its flexibility due to a voluminous chamber with numerous flanges for attaching other components. This large flexibility is required to have room for cryo installations, sample transfer unit(s), Gas Injection System (GIS) as well as analytical tools.

Mercell Holding AS

Part of the Mercell Group, one of Europe’s leading providers of e tender systems and information between buyers and suppliers in the professional market.

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