Tildelingsinformationer
The purchase relates to a refurbished four year old demo model of an electronlithography tool. The main unit is an eLINE Plus tool from Raith equipped with a 30 kV Gemini column from Zeiss, an interferometer controlled precision stage and beamsteering control system and software from Raith. The eLINE tool extinguishes itself beyond the column and stage especially by its flexibility due to a voluminous chamber with numerous flanges for attaching other components. This large flexibility is required to have room for cryo installations, sample transfer unit(s), Gas Injection System (GIS) as well as analytical tools.