The Helium-Neon microscope has to meet the following demands:
— Imaging with sub-nanometer resolution using focused Helium ion beam;
— Imaging with focused Neon ion beam;
— Nanofabrication with sub-10 nanometer resolution using focused Helium ion beam;
— Nanofabrication using focused Neon ion beam;
— Fast microfabrication using focused Gallium ion beam.