Danmarks Tekniske Universitet 30060946 Anker Engelundsvej 1 Kongens Lyngby 2800 Alexi Burns-Tang alexi@adm.dtu.dk www.dtu.dk FC2000 Electron-Beam Evaporation system. Electron-Beam Evaporation system for thin-film deposition of various metal layers (single/multiple) on various substrates, typical 2”, 4”, and 6” wafers for device fabrication based on top-down micro/nano technology. The tool should provide high-throughput solutions (total processing time < 15 min (process start at 5x10-6 Torr), including load/unload) for single wafer as well as larger wafer batches (4 substrates of up to 150 mm). 3062186.00 DTU Danchip, Kongens Lyngby-Tårbæk, Denmark. Electron-Beam Evaporation system for thin-film deposition of various metal layers (single/multiple) on various substrates, typical 2”, 4”, and 6” wafers for device fabrication based on top-down micro/nano technology. The tool should provide high-throughput solutions (total processing time < 15 min (process start at 5x10-6 Torr), including load/unload) for single wafer as well as larger wafer batches (4 substrates of up to 150 mm). A main application of the metal lay-er stacks is structure definition by lift-off, where it is essential to obtain highest possible control of uniformity and avoid side wall deposition on the de-fined photo-resist structures. For this particular application FerroTec-Temescal has developed a unique solution (patented) named HULA Electron-Beam Evaporation system for thin-film deposition of various metal layers (single/multiple) on various substrates, typical 2”, 4”, and 6” wafers for device fabrication based on top-down micro/nano technology. The tool should provide high-throughput solutions (total processing time < 15 min (process start at 5x10-6 Torr), including load/unload) for single wafer as well as larger wafer batches (4 substrates of up to 150 mm). A main application of the metal layer stacks is structure definition by lift-off, where it is essential to obtain highest possible control of uniformity and avoid side wall deposition on the de-fined photo-resist structures. For this particular application FerroTec-Temescal has developed a unique solution (patented) named HULA dome which is a magnetically driven planetary motion substrate holder, in a lift-off configuration with up to 4 substrates of up to 150 mm, rotating individually on 2 axis, which can provide the high uniformity metal layer stack depositions without shadow masks which tends to be the standard solution in other systems. With the HULA system it is possible to deposit metal layer stacks with better than 2 % uniformity and avoid side wall deposition, with no shadow mask. Moreover, deposited material uniformity is independent of deposition rate, giving a wide process window. The Temescal machine with the HULA system offers a completely unique approach to deposition of highly uniform metal stacks. Other manufacturers resort either to a very long distance from crucible to sample or to using shadow masks. The long distance leads to excessive waste of material which is a particular concern when dealing with expensive noble metals such as gold or platinum. Shadow masks must be designed for specific materials and specific deposition conditions and thus starkly limit the process window available for depositions. All in all the HULA option provides an efficient solution for reduced material consumption and maximum process window, which to our knowledge, no other supplier can achieve. Further advantages of evaporation without a mask are higher effective deposition rates, leading to faster cycle times and superior material collection efficiency, which is especially important when depositing expensive precious metals, such as Au & Pt. FerroTec-Temescal has solid documentation on this systems capabilities with more than 25 sold systems worldwide and we have tested the system to our full satisfaction. For us it is essential that FerroTec-Temescal can demonstrate both the capability and the experience documented with the more than 25 sold systems. Best quality 100 0 The Temescal machine with the HU-LA system offers a completely unique approach to deposition of highly uniform metal stacks. Other manufacturers resort either to a very long distance from crucible to sample or to using shadow masks. The long distance leads to excessive waste of material which is a particular concern when dealing with ex-pensive noble metals such as gold or platinum. Shadow masks must be designed for specific materials and specific deposition conditions and thus starkly limit the process window available for depositions. All in all the HULA option provides an efficient solution for reduced material consumption and maximum process window, which no other supplier can achieve. Further advantages of evaporation without a mask are higher effective deposition rates, leading to faster cycle times and superior material collection efficiency, which is especially important when depositing expensive precious metals, such as Au & Pt. FerroTec-Temescal has solid documentation on this systems capabilities with more than 25 sold systems world-wide and we have tested the system to our full satisfaction. For us it is essential that FerroTec-Temescal can demonstrate both the capability and the experience documented with the more than 25 sold systems. 2017-08-31 Temescal A Division of Ferrotec 4569 C Las Positas Road Livermore CA 94551 https://temescal.ferrotec.com/ 3062186.00 Danish Complaints Board Nævnenes Hus, Toldboden 2 Viborg 8800 +45 35291000 klfu@erst.dk https://erhvervsstyrelsen.dk/klagenaevnet-for-udbud Danish Competition and Consumer Authority Carl Jacobsensvej 35 Valby 2500 2017-08-31
See tender at TED: http://ted.europa.eu/udl?uri=TED:NOTICE:343693-2017:TEXT:EN:HTML