Københavns Universitet Nørregade 10 Copenhagen 1017 Caroline Volf +45 35333391 caroline.volf@adm.ku.dk www.oko.ku.dk university Acquisition of an Elionix ELS-F125 to the Danish national scientific infrastructure center Quantech, The Niels Bohr Institute, University of Copenhagen. 043-0257-17-7000 Quantech is a new national center whose infrastructure is to be installed and administered by several universities in Denmark. The present procurement is carried out by The Niels Bohr Institute at University of Copenhagen. Quantech will provide electron-beam lithography and other services to academia and industry within the emerging quantum technologies. 11000000.00 As part of the new Danish national scientific infrastructure center Quantech, The Niels Bohr Institute at University of Copenhagen is procuring an instrument for electron-beam lithography for development of nanoscale components for quantum technologies. Quantech is an open facility with a projected used base comprised of both academia, SMEs, and established high-tech companies. According to the European Parliament and Council Directive No. 2014/24/ EC, Article 32. 2, point b, the University of Copenhagen believes that the present system from Elionix is the only system in the world that meets our requirements. A critical parameter for the Quantech center in competition with other facilities in Denmark and Sweden is the proximity error, which is very sensitive to the acceleration voltage. The higher the acceleration voltage, the smaller the proximity error. Only one company in the world produces electron beam lithography systems with >100 kV and that is Elionix Inc. who produce a 125 kV system. This is the state of the art and the only product of its kind. Additionally, we need a compact footprint, high throughput, upgradability to automatic wafer loader, linewidths down to 5 nm, stitching accuracy of at maximum ±10 nm and overlay accuracy of at maximum ±15 nm, and these specifications are met by the present instrument. According to the European Parliament and Council Directive No. 2014/24/ EC, Article 32. 3, point d, University of Copenhagen is convinced that the acquisition will be made on particularly favorable terms that can not be matched by tendering as there is already another electron-beam lithography system from Elionix installed in the building where the present machine is to be installed. In order to share knowledge amongst technical staff, save money on service contracts, and generally exploit synergies, we prefer buying the present system from Elionix. 2017-05-16 SEMTech Solutions Inc. 6 Executive Park Drive North Billerica MA 01862 +1 9786639822 gerry@semtechsolutions.com http://www.semtechsolutions.com 11000000.00 Klagenævnet for Udbud Dahlerups Pakhus, Langelinie Allé 17 København Ø 2100 +45 35291000 klfu@erst.dk http://www.klfu.dk Kokurrence- og Forbrugerstyrelsen Carl Jacobsens Vej 35 Valby 2500 +45 41715000 kfst@kfst.dk http://www.kfst.dk 2017-05-16
See tender at TED: http://ted.europa.eu/udl?uri=TED:NOTICE:189035-2017:TEXT:EN:HTML